HT-6000 & HT-7000 Series Cleaning Sheets
The HT-6000 & HT-7000 Series Cleaning Sheets remove probing debris from probe tips while minimizing probe wear. They can be used for on-line and off-line cleaning* and can be applied to both radius and flat probe tips. Moreover, the adhesive backing on these cleaning sheets makes it easy to apply to various substrates, including wafers and prober cleaning chucks. The HT-6000/7000 Series are also less expensive than other types of cleaning sheets. Their cleaning effectiveness is shown in the figures to the right. Bebris accumulated at probe tip is removed after using the cleaning sheet.
*HT-23X Series Cleaning Sheet is available for more aggressive off-line cleaning & reshaping of probe tips.
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before cleaning | after cleaning |
Specifications:
| Particle Size: | #3 (4-5µm), #6 (2-3µm), #8 (1µm) |
| Temp. Range: | 0-105°C |
| Applications: | 2"(ø50mm), 6"(ø150mm), 8"(ø200mm) wafers or cleaning chucks on EG, TEL or TSK probers |
| Sheet Shape: | HT-6000 (A4 size, cut to 2", 6", 8" wafer size or custom size for EG, Tel, TSK probers) HT-7000 (cut to 2", 6" or 8" wafer size) |
| Sheet Thickness: | 0.4mm |
| Substrate Options (HT-7000 Series only): | B: stainless steel substrate D: aluminium substrate W: 6" or 8" wafers |
Part numbers: | 2" | 6" | 8" | A4 size | Custom sizes** |
| HT-6000 (cleaning sheet only) | HT6X02 | HT6X06 | HT6X08 | HT6XA4 | HT6XEG |
| HT-7000 (attached to substrate) | HT7X02B | HT7X06W | HT7X08W | n/a | n/a |
Note: The "X" in the part numer indicates particle size option #3 #6 #8
**These custom sizes are for EG 4090, TEL P8 XL and TSK UF200 prober models.
Recommendations:
| Selecting Particle Size | Cleaning conditions |
| VCPC - Size #8 Epoxy cards (Radius tips with mirror finish) - Size #8 Epoxy cards (Radius tips, Flat tips, J-Probe) - Size #6 or #3 (size #3 is recommended for more aggressive cleaning) | Overdrive - 70µm No. of Touchdowns - 50 XY Indexing - 100µm/touchdown |